JPS60238732A - 差圧発信器 - Google Patents
差圧発信器Info
- Publication number
- JPS60238732A JPS60238732A JP9387984A JP9387984A JPS60238732A JP S60238732 A JPS60238732 A JP S60238732A JP 9387984 A JP9387984 A JP 9387984A JP 9387984 A JP9387984 A JP 9387984A JP S60238732 A JPS60238732 A JP S60238732A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure side
- diaphragm
- low
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 35
- 230000004888 barrier function Effects 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 230000006378 damage Effects 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000003376 silicon Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9387984A JPS60238732A (ja) | 1984-05-12 | 1984-05-12 | 差圧発信器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9387984A JPS60238732A (ja) | 1984-05-12 | 1984-05-12 | 差圧発信器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60238732A true JPS60238732A (ja) | 1985-11-27 |
| JPH045131B2 JPH045131B2 (en]) | 1992-01-30 |
Family
ID=14094758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9387984A Granted JPS60238732A (ja) | 1984-05-12 | 1984-05-12 | 差圧発信器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60238732A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01256177A (ja) * | 1988-04-06 | 1989-10-12 | Hitachi Ltd | 多機能センサ |
-
1984
- 1984-05-12 JP JP9387984A patent/JPS60238732A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01256177A (ja) * | 1988-04-06 | 1989-10-12 | Hitachi Ltd | 多機能センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH045131B2 (en]) | 1992-01-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1223453A (en) | Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm | |
| US4565096A (en) | Pressure transducer | |
| US4670733A (en) | Differential pressure transducer | |
| US4574640A (en) | Integrated dual-range pressure transducer | |
| JPS59125032A (ja) | 差圧測定装置 | |
| JPS60238732A (ja) | 差圧発信器 | |
| JPS59145940A (ja) | 差圧・圧力伝送器 | |
| CN112649139A (zh) | 传感器元件 | |
| JPS6239368B2 (en]) | ||
| JP3105087B2 (ja) | 差圧検出器 | |
| JPH0436425Y2 (en]) | ||
| JPH0339624B2 (en]) | ||
| JPS6042351Y2 (ja) | 圧力計 | |
| JP2643906B2 (ja) | 圧力センサ | |
| JPH0212581Y2 (en]) | ||
| JPH0436424Y2 (en]) | ||
| JPH0752601Y2 (ja) | 差圧伝送器 | |
| JPH0587664A (ja) | 半導体差圧伝送器 | |
| JPH05187948A (ja) | 差圧測定装置 | |
| JPS6071928A (ja) | 差圧伝送器 | |
| JPS63113331A (ja) | 圧力センサ | |
| JPH05172676A (ja) | 差圧測定装置 | |
| KR830004600A (ko) | 차압 검출기(差壓檢出器) | |
| JPS60220838A (ja) | 差圧発信器 | |
| JPH05142077A (ja) | 差圧測定装置 |